发明名称 |
BAKING DEVICE FOR FILAMENT |
摘要 |
PURPOSE:To detect the completion of baking accurately even when small amount of air is leaked into the casing, by detecting the vacuum in the casing such that the output variation of a vacuum meter when the baking current is periodically supplied to the filament is detected. CONSTITUTION:A vacuum casing 1 is connected through an exhaust tube 2 to a vacuum pump while a X-ray generating target 3 is located in the casing 1 and a a filament 4 is grounded to be fixed in the casing. The current flowing through said target 3 is detected by a detection resistor 8 and the detected signal is provided to a heating power source 7 which controls the heating current supplied to the filament 4 such that the detection signal will always coincide with the referential level. A vacuum meter 13 will produce a signal corresponding with the vacuum in the casing 1 and supply to the first and second sample & hold circuits 14. Consequently the completion of baking can be detected accurately. |
申请公布号 |
JPS56167231(A) |
申请公布日期 |
1981.12.22 |
申请号 |
JP19800071689 |
申请日期 |
1980.05.29 |
申请人 |
NIPPON ELECTRON OPTICS LAB |
发明人 |
ITOU TAKASHI;MUROTA MASAO |
分类号 |
H01J9/06;H01J9/08;H01J9/44 |
主分类号 |
H01J9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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