发明名称 METHOD FOR SMOOTHING VAPOR-DEPOSITED FILM SURFACE
摘要 PURPOSE:To smooth the surface of the vapor-deposited film on a substrate without degrading the properties of the film at all by treating the projecting parts of the surface of said film by pressure. CONSTITUTION:If the surface of a vapor deposition film 2 deposited under vacuum on the surface of a substrate 1 is rubbed with a soft cloth or the like, plastic deformation is easily caused in the film 2 by the pressure of friction because the film 2 is extremely porous and soft in general. Projecting parts 3 move into the inside or recessed parts of the film 2, thereby smoothing the surface of the film 2. At the time of this friction, required smoothness is sufficiently obtained by manual pressure by using a dry cloth, but if it is rubbed by a clotch attached with water and finely pulverized powder of cerium oxide or the like, the improving effect of smoothness is much higher.
申请公布号 JPS56166373(A) 申请公布日期 1981.12.21
申请号 JP19800071085 申请日期 1980.05.27
申请人 TOSHIBA GLASS KK 发明人 KINOSHITA TAKASHI
分类号 C23C14/58 主分类号 C23C14/58
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