发明名称 WIRE BONDING APPARATUS
摘要 PURPOSE:To accomplish bonding automation and manpower reduction by providing a low-cost, easily adjustable clamp mechanism. CONSTITUTION:A clamper is arranged between a capillary 35 and air tension mechanisms A and B. An elastic body 23 in a clamper contains a tube with an inner diameter larger than the wire diameter of a wire 31. When a coil 29 is electrified, a movable body 24 comprising a permanent magnet moves upward by electromagnetic force. As a result, the elastic body 23 is compressed, causing a deflection in the radial direction of the elastic body 23. The wire 31 is held by the elastic body 23 and fixed.
申请公布号 JPH06252199(A) 申请公布日期 1994.09.09
申请号 JP19930039007 申请日期 1993.02.26
申请人 TOSHIBA CORP 发明人 NUMATA HIDEO
分类号 H01L21/60 主分类号 H01L21/60
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