| 摘要 |
PURPOSE:To avoid the occurence of a bad processing by a method wherein pairs of feed rollers provided with specialized positional relations are utilized in the process for making the master (lithography) insensitive to fat by roller coating method. CONSTITUTION:Respective roller pairs are formed by providing the upper rollers 5, 6, 7 on the lower rollers 2, 3, 4 which are dipping the lower parts thereof into etching liquid in a liquid tank 1 so as to contact the outer peripheral surfaces slidably with each other, on the other hand, a roller pair 8 for feeding the master M is provided against the first step roller pair consisting of the rollers 2, 5 and, further, the upper roller 8b thereof is arranged so as to be deviated to the first step roller pair (the rollers 2, 5) side compared with the lower roller 8a (here; numeral 9 designates a lower guide plate). When respective rollers are rotated into directions shown by arrow signs, pools 10 of the etching liquid, drawn up by the lower rollers, are formed at the engaging parts of the roller pairs, however, the master M introduced by the feed roller pair 8 is proceeded toward the lower zone of the etching liquid pool 10 in such a manner that it sqeezes the etching liquid, therefore, sufficient etching liquid may be supplied to the surface to be processed. |
