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发明名称
VERFAHREN ZUR HERSTELLUNG HOCHWAERMEBESTAENDIGER RELIEFSTRUKTUREN UND DEREN VERWENDUNG
摘要
申请公布号
DE3021787(A1)
申请公布日期
1981.12.17
申请号
DE19803021787
申请日期
1980.06.10
申请人
SIEMENS AG
发明人
AHNE,HELLMUT,DIPL.-CHEM.DR.;KUEHN,EBERHARD;RUBNER,ROLAND,DIPL.-CHEM.DR.
分类号
G03F7/004;C08F2/00;C08F2/46;C08G73/06;C08G73/10;C08G73/18;C08G73/22;C08L79/08;G03F7/027;G03F7/038;H01L21/027;H05K3/00;(IPC1-7):G03F7/26;B05D3/06;B05D5/00;B05D7/26;G03C1/68
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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