| 摘要 |
PURPOSE:To enable the stable measurement of an IC by providing the second electrode element which does not contact with the first electrode element and the third electrode element which contacts with the ground terminal of an IC and providing a conductive pattern on an insulating plate to which the second and the third electrode elements are connected. CONSTITUTION:The first to the third electrode elements 11-13 are amounted on the first insulating plate 14, the second insulating plate 15 insulates the first electrode element from the second the third electrode elements, and the second electrode element is disposed parallel to the first electrode element but is not contacted directly with an IC16. The second and third electrodes are electrically connected to a conductor 17 and a ground pattern 18. Thus, the sectional area of the current passage of the electrode elements connected to the ground terminal of the IC16 is increased and equivalently becomes small high frequency impedance as the electrode element, thereby enabling the stable measurement of the IC without losing the electric characteristics. |
