| 摘要 |
PURPOSE:To prevent the charging of a mask for an integrated circuit on which a desired pattern of light shielding substance is selectively formed on the main surface of an insulating and light transmitting substrate and to prevent the damage of the pattern and the adherence of dusts by covering further a conductive and light transmitting substance on the mask. CONSTITUTION:A quartz substrate 101 on which a desired pattern of chromium, oxidized chromium 102 is covered is coated on the surface with indium oxide, tin oxide or the like as a conductive substance, and is used as a mask for an integrated. circuit. The light transmission factor of these conductive substances is higher than 80%. Further, the surface 105 of the mask 101 to be contacted with a mask supporting base 104 is formed electrically conductive. Thus, it can prevent the charging of the mask and prevents the damage of the pattern and the adherence of dusts thereon. |
