| 摘要 |
PROBLEM TO BE SOLVED: To easily follow a polished surface by connecting a support plate and a holding plate to each other concentrically and parallel to each other, and providing an elastic connecting member which has large rigidity to the peripheral direction of main shaft rotation and is elastically deformed in the vertical direction to the polishing surface of a level block. SOLUTION: An elastic member 13 has a large rigidity in the longitudinal direction of a plate spring (in parallel direction on plane where a support plate 11 and a holding plate 12 are rotated), so that it has a function of transmitting rotation torque between the support plate 11 and the holding plate 12 as a whole. The elastic connecting member 13 is deformed flexibly in the direction of board thickness of a plate spring, that is, in the vertical direction to the polishing surface so as to exhibit a function of smoothly tilting the holding plate 12 according to the shape of the polishing surface. A workpiece 2 is sucked to the lower surface of the holding plate 12 by evacuation through an air piping member 19. |
