| 发明名称 |
GAS SUPPLY UNIT FOR SEMICONDUCTOR PRODUCTION DEVICE |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas supply unit for a semiconductor production device which can supply various kinds of gases to each device by the use of one gas governing box and improve utility and producibility of space. SOLUTION: A gas supply unit for semiconductor production devices 80 is housed in a housing part 70 so as to supply plural kinds of gas. The gas supply unit is composed of a gas cabinet no which is arranged on an outer side of the housing part 70 for housing gas baths 20 respectively storing gases according to their kinds and a gas governing box 50 which supplies gases respectively supplied from the gas baths in the gas cabinet 10 through gas lines 30 by means of gas supply pipes 90 which is laid out so as not to cross with each other.</p> |
| 申请公布号 |
JPH10141599(A) |
申请公布日期 |
1998.05.29 |
| 申请号 |
JP19970283998 |
申请日期 |
1997.10.16 |
| 申请人 |
LG SEMICON CO LTD |
发明人 |
JIAE UON PAKU |
| 分类号 |
F17D1/02;B01J4/00;F17C13/04;F17D1/04;H01L21/00;H01L21/02;H01L21/203;H01L21/302;H01L21/3065;H01L21/31;H01L21/48;(IPC1-7):F17D1/02;H01L21/306 |
主分类号 |
F17D1/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
