| 摘要 |
<p>PURPOSE:To control the temperature efficiently, by applying a voltage corresponding to the radiant heat capacity in a heater and a heater supporting part as a heat radiation bias quantity. CONSTITUTION:If the temperature higher than the current set temperature is set, a difference is generated between the output of a temperature detecting amplifier 2 and the output of a set temperature amplifier 2, and an output corresponding to change components is generated in an error amplifier 5. This error output and heat radiation for the set temperature are input to an adder 6 as bias components and are added to increase the power source phase and heat the heater. In case of transfer to this high-temperature part, the rise time from the low-temperature part to the high-temperature part is controlled very rapidly with a high precision by the deviation control due to the output where radiant heat quentity components in the temperature are added. In case of transfer from the high-temperature part to the low- temperature part, a good fall characteristic is obtained also by the bias quantity of the high temperature, the bias quantity of the low-temperature part, and subtraction of temperature error components.</p> |
