| 摘要 |
PURPOSE:To perform uniform drying and barning, by spraying a surfactant solution after development then blowing clean and hot air from both faces of a board material to blow off the surfactant solution. CONSTITUTION:A board material 6 coated with casein system photo-resist and exposed is carried to a drain chamber 9. In the drain chamber 9, a surfactant or a mixed liquid 10 containing 0.15-0.25% of product named P3 NEXO 129T is sprayed through nozzles 19, 20 to both faces of a board material 6. Then the board material 6 is carried to a hot air blow chamber 21 and the hot wind of approx. 40 deg.C temperature and approx. 0.5m<3>/s flow is blown from a blow section 25 having a slit opening longer than the width of the board material 6 and the blowing angle is freely adjustable to both faces of the board material 6 to blow off the NEXO solution from the resit face. Thereafter the board material 6 is carried to a drying chamber 6 and a barning chamber 28. Consequently the drying and the barning are made uniform to produce a uniform mask. |
