发明名称 Complementary MOSFET device and method of manufacturing the same
摘要 A CMOS device comprising an N type semiconductor substrate, a P type well region diffused in the substrate, an n-channel MOS transistor formed in the P type well region, and a p-channel MOS transistor formed in the N type semiconductor substrate, and a method for manufacturing the CMOS device. In case the CMOS device serves as a CMOS inverter, the source region of the p-channel MOS transistor, the semiconductor substrate and the well layer constitute a parasitic PNP type bipolar transistor, and the source region of the n-channel MOS transistor, the well layer and the semiconductor substrate constitute a parasitic NPN type bipolar transistor. The product of the current amplification factor beta 1 of the PNP type bipolar transistor and the current amplification factor beta 2 of the NPN type bipolar transistor is smaller than 1.
申请公布号 US4302875(A) 申请公布日期 1981.12.01
申请号 US19790041764 申请日期 1979.05.23
申请人 TOKYO SHIBAURA ELECTRIC CO., LTD. 发明人 SATOU, KAZUO;UENO, MITSUHIKO
分类号 H01L21/324;H01L21/8238;H01L27/092;H01L29/167;(IPC1-7):H01L21/40 主分类号 H01L21/324
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