ANGULAR SPEED MEASUREMENT METHOD USING RESONANCE TYPE MICRO-GYROSCOPE AND ITS MANUFACTURING METHOD

摘要

PURPOSE: A micro-gyroscope is provided to ensure detection electrodes easy in formation and excellent in sensitivity by using a micro-bridge stationary wave capable of being manufactured by micro-machining. CONSTITUTION: An anchor(17) is placed at both ends of a silicon beam(11) for fixing the beam(11). The first pseudo-vibration electrode(12) is positioned the upper center of the silicon beam(11). The second and third pseudo-vibration electrodes(15,16) are positioned at both ends of the silicon beam(11). The first and second detection electrodes(13,14) are positioned at inflection points of the first vibration mode due to the bending of the silicon beam(11). When the silicon beam(11) is resonated along the direction(A) perpendicular to the plane defined by the silicon beam(11) and a resonance mode is deformed by the Coriolis' force generated by a rotative angular velocity(B) perpendicular to the longitudinal direction and the vibration direction(B) of the silicon beam(11), the detection electrodes(13,14) detect the magnitude of the deformation.