| 摘要 |
PURPOSE:To enhance an energy efficiency and a recovery rate without necessity of a large quantity of reactive gas, by forming a reaction part with a bottomed longitudinally long vessel, and arranging the central axis of the vessel along a gravity direction. CONSTITUTION:A reaction cylinder 5 is evacuated by the operation of a pump 14a, without feeding a silica powder 26. Thereafter, a valve 14d is closed and a valve 30 is opened, to introduce a gaseous mixture of nitrogen and hydrogen from a reactive gas reservoir 19 into the reaction cylinder 5. A valve 32 is opened, to drop the silica powder 26 through a powder introduce pipe 13 onto the bottom of the reaction cylinder 5. The plasma 31 of the gaseous mixture is concurrently generated at the bottom of the reaction cylinder 5, by the microwave electric power from the microwave oscillator 1. Due to the plasma 31, reactive seeds such as nitogen ion, nitrogen-hydrogen molecular ion or various radicals are generated, and consequently the reducing nitriding synthetic reaction of the silica powder is promoted. The valve 30, 32 and a valve 16 are closed, and a valve 33 is opened to introduce nitrogen until the interior reaches the atmospheric pressure, and to introduce air through an introduce pipe 22 for cooling the reaction cylinder 5. Thereafter, the reaction cylinder 5 is taken out. |
