摘要 |
PROBLEM TO BE SOLVED: To improve the LC characteristic and reduce the LC value variation by leaving a sintered Nb powder compact in a nitrogen atmosphere after sintering. SOLUTION: In the capacitor manufacturing, an Nb sintered block constituting one electrode of a capacitor is partly nitrified. The sintered block is left at 10-1-10-6 Torr, 1000-2000 deg.C for several minutes-several hours after sintering an Nb powder at high temperatures in a vacuum and pressure-forming it wherein the quantity of N combined with Nb is 10-150000 ppm. For a capacitor using a dielectric of Ta oxide, an alkoxy complex, acetylacetonate complex, etc., are deposited on the electrode, hydrolyzed and/or thermally decomposed to produce Ta oxide. For a dielectric using Nb oxide, a partly nitrified Nb sintered block is formed in an electrolyte solution or an alkoxy complex, acetylacetonate complex, etc., deposited on the electrode, hydrolyzed and/or thermally decomposed to produce Nb oxide.
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