| 摘要 |
PURPOSE:To unify a formation film thickness by a parallel flat plates electrode type apparatus by a method wherein a container provided with a feed water pipe and a drain pipe on the reverse side of the electrode, and a permanent magnet unit is housed supported by a water wheel in the container and rotated by a cooling water flow. CONSTITUTION:In, for example, a spattering device provided with the electrodes in parallel flat plate-type, the permanent magnet unit 6 comprising the permanent magnets 6a, 6b and the magnetic flat plate 6c is disposed on the reverse side of a cathode 3 so as to form a magnetic field between the electrodes. The magnet unit 6 is housed in the cooling water container 12 fitted with the feed pipe 7 and the drain pipe 8 without being directly fitted to the cathode, and the container 12 is disposed on the reverse side of the cathode 3. The magnet unit 6 is supported by the water wheel 9 fitted inside the coaxial feed and drain pipes, through a bearing 11, and rotated integratedly with the water wheel 9 by the flow of the cooling water. Thereby, the magnetic field can be unified and accordingly, the formation film thickness or an etching work can be made uniform. |
