| 摘要 |
PURPOSE:To eliminate fault produced when an object to be measured is under loading and unloading and to permit a high-precision measurement, by a method wherein, instead of a guide in the direction of an X axis, a cylindrical coordinate is constituted such that an R axis, supporting a Z axis, being rotatable against a theta axis. CONSTITUTION:Instead of a guide in the direction of an X axis, a cylindrical coordinate is constituted such that an R axis for supporting a Z axis can rotate against a theta axis. A theta axis 4 is pivotally and perpendicularly mounted at the center of a circular table 1, and the R axis 5 is horizontally secured on the upper part of the theta axis. A carriage 7 is horizontally installed on a guide 6 fastened at the inside of the R axis 5, and a Z axis 15 is slidably supported on the carriage so that the Z axis is positioned at right angles to the R axis 5. Without the need for installation of a long-sized guide, this permits the highly precise measurement of a turning angle of the theta axis by means of a scale 3 for theta axis, mounted at a spherical side surface of a circular table, the movement amount of the carriage 7 by means of a scale 8 for R axis located at a guide 6, and the movement amount of the Z axis by means of a scale 16 for Z axis secured on the Z axis. |
