| 摘要 |
<p>PURPOSE:To obtain the stable and highly reliable thin-film thermal head by providing a heating resistor film and an electrode film on an insulated substrate and by providing further on the surface thereof an anti-abrasive protection film prepared by laminating specified layers. CONSTITUTION:On the insulated substrate 1 are provided the heating resistor film 2 of Ta-SiO system and the electrode films 3a and 3b making electrification to the former. Further on the surface thereof is provided the anti-abrasive protection film prepared by connecting A Ta2O5-Si mixture film or a Ta-SiO2 mixture film as the 1st-layer protection film 4 thereon and further connecting a Ta2O5 film as the 2nd-layer protection film 5 on the film 4. Since the 1st-layer protection film 4 as a buffer layer for thermal strain is connected directly on the heating resistor and the electrodes, it is required to guarantee insulation resistance of a fixed level or higher between the electrodes. The specific resistance desired for the 1st-layer protection film 4 varies based on the thickness of the film, the area of connection thereof and the distance between the electrodes, and generally, the specific resistance ten times as large as that of the heating resistor is required.</p> |
