| 摘要 |
<p>PURPOSE:To economically and easily obtain hydrogen having >=99.9999% purity by recovering hydrogen in a purged gas consisting a part of hydrogen occluded in a hydrogen storage alloy and impurity gas not occluded in the alloy by the Pd-membrane permeation method. CONSTITUTION:A raw material gas 1 contg. hydrogen having about 99.99% purity is transferred to a purification cylinder 5 packed with hydrogen storage alloy such as LaNi, etc., and equipped with a heat exchanger 6 after adjusting its pressure 2. Hydrogen in the raw material gas transferred to the purification cylinder is selectively occluded in the alloy and impurity gas other than hydrogen is left in a space of the cylinder 5. After this hydrogen occlusion process, the impurity gas remaining in the cylinder 5 is purged with H2 desorbed from the alloy by reducing the pressure of the cylinder 5 and transferred to a purification vessel 11 having Pd-membrane. In the vessel 11 heated inside at 300-500 deg.C, only H2 gas in the purged gas is permeated through the Pd-membrane and supplied to a product line 13 as product, purified H2 gas. On the other hand, impurity gas other than H2 gas is exhausted 14 from the vessel 11.</p> |
