| 摘要 |
PURPOSE:To prevent sticking of dust on sample surface by providing a gas injection port to the lens-barrel of a microscope combining bright field and dark field microscopic methods and blowing gas diagonally through the space between an objective lens group and a lens frame. CONSTITUTION:A gas injection port 9 is provided to the lens-barrel 8 of a microscope combining a bright field microscopic method and a dark field microscopic method, and clean air 10 is fed through this port, so that the air is blown diagonally to a sample surface 11 through the space between an objective lens group 1 and an objective lens frame 2. Thereby, sticking of dust on the sample surface is prevented. |
