| 摘要 |
PURPOSE:To automate cleaning and drying steps in a consistent basis by forming a V-shaped groove perpendicularly crossing with the conveying direction at the top of a conveyor belt for carrying an erected plate and forming a pair of guide members having jet holes at both tip sides of the plate. CONSTITUTION:A rectangular stepped part 38 perpendicularly crossing with the conveying direction is formed on the top surface of a conveyor belt 37 for conveying an erected plate 11 such as a photomask for manufacturing a semiconductor, a reticle, a wafer or the like, V-shaped grooves 39 are formed on the conveying route surface A-A of the plate, a pair of guide members 13 having jet holes 35 are arranged in parallel at both top sides of the plate, and pure water or clean air is injected from the jet holes to perform the cleaning or the drying. Since the cleaning and the drying steps can be thus automated thoroughly and the overall plate can be simultaneously treated, the treating time can be largely shortened. |
