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经营范围
发明名称
MASK STRUCTURE FOR X-RAY LITHOGRAPHY.
摘要
申请公布号
EP0029058(A4)
申请公布日期
1981.11.25
申请号
EP19800901105
申请日期
1980.12.01
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
LEPSELTER, MARTIN PAUL;LEVINSTEIN, HYMAN JOSEPH;MAYDAN, DAN
分类号
G03F1/00;G03F1/14;H01L21/30;(IPC1-7):G03B41/16
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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