发明名称 MEASURING DEVICE FOR DEGREE OF VACUUM
摘要 PURPOSE:To reliably detect discharge and to minimize a change in pressure, by a method wherein, through the detection of discharge, the discharge in a vacuum bulb to be measured is caused to suspend after a given period of time has elapsed. CONSTITUTION:A magnetic field generating coil 2 is activated, through a power source 4, from which the magnetic field generating coil 2 is energized, and the magnetic fields are applied around vacuum bulb 1 to be measured. With a high- voltage generating circuit 3 actuated, a control circuit 6 applies a high-voltage to one of electrodes of the vacuum bulb 1 to be measured whose contact is caused to part. A magnetron discharge is generated in the vacuum bulb 1, and is detected by means of a discharge current measurement circuit 5. The signal is sent to a control circuit 6, and causes the high-voltage generating circuit 3 to suspend working after a delay time, during which a discharge current is brought into a stable state, has elapsed. This finds the degree of vacuum from a discharge current value.
申请公布号 JPS56151334(A) 申请公布日期 1981.11.24
申请号 JP19800054283 申请日期 1980.04.25
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 NIIDE TATSUAKI;MIYAHARA KUNIO;SATAKE MATSUO
分类号 G01L21/30;H01H33/66 主分类号 G01L21/30
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