发明名称 SEMICONDUCTOR DEVICE AND ITS FABRICATING METHOD
摘要 PROBLEM TO BE SOLVED: To enhance machining accuracy and production efficiency of a semiconductor device. SOLUTION: A semiconductor laser comprises a lower clad layer 3, an active layer 4, an upper clad layer 5, a contact layer 9, and an insulation film 6 formed on the upper surface of a semiconductor substrate 2. The upper clad layer 5, the contact layer 9, and the insulation film 6 are subjected to etching to form a ridge 12. Furthermore, a negative electrode 1 is formed on the lower surface of the semiconductor substrate 2 and a conductor layer 7 is formed on the upper surface of a multilayer film substrate 31. The conductor layer 7 has a thickness of at least 150 nm on the side face of the ridge 12 having a sandglass-like cross section.
申请公布号 JP2002261380(A) 申请公布日期 2002.09.13
申请号 JP20010390563 申请日期 2001.12.21
申请人 FURUKAWA ELECTRIC CO LTD:THE 发明人 YABUSAKI KEIICHI;OKUBO NORIO
分类号 H01S5/042;(IPC1-7):H01S5/042 主分类号 H01S5/042
代理机构 代理人
主权项
地址