发明名称 METHOD AND DEVICE FOR GENERATING AN ACTIVATED GAS CURTAIN FOR SURFACE TREATMENT
摘要 The invention relates to a surface treatment device comprising: electrodes (24a, 24b) that are used to initiate an electric arc of stabilised plasma (14); a stabilising channel (12) which is disposed in a body (10) in order to confine the electric arc of stabilised plasma; conduits (38, 39) which are disposed in the body and used to introduce a treatment gas Q1, uniformly distributed along the arc, upstream of the arc in a direction that is essentially perpendicular to axis A of said arc in such a way as to form an activated gas curtain (8); means for introducing a complementary treatment gas Q2 downstream of the electric arc; and a support (28) that is used to hold the object or material to be treated in place and to position the object or material surface to be treated in relation to the body (10).
申请公布号 WO02091809(A2) 申请公布日期 2002.11.14
申请号 WO2002IB01482 申请日期 2002.05.03
申请人 APIT CORP. S.A.;KOULIK, PAVEL;SAMSONOV, MIKHAIL;EVGUENIA, ZORINA 发明人 KOULIK, PAVEL;SAMSONOV, MIKHAIL;EVGUENIA, ZORINA
分类号 H05H1/48;H01L21/3065;H01L21/31;H01L21/316;H05H1/24 主分类号 H05H1/48
代理机构 代理人
主权项
地址