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发明名称
Phase-shift-moire focus monitor
摘要
申请公布号
GB2400922(B)
申请公布日期
2005.07.20
申请号
GB20040003489
申请日期
2002.02.22
申请人
* ADVANCED MICRO DEVICES, INC
发明人
BRUNO * LAFONTAINE;JONGWOOK * KYE;HARRY * LEVINSON
分类号
G03F7/207;G03F9/00;H01L21/027;(IPC1-7):G03F9/00
主分类号
G03F7/207
代理机构
代理人
主权项
地址
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