摘要 |
PURPOSE:To improve the reliability of a bubble element by providing a soft magnetic pattern in an area overlapping with a functional gate control conductor pattern and by further providing another soft magnetic pattern in a circumferential area overlapping with a thin magnetic bubble film. CONSTITUTION:On thin magnetic bubble film 1 mde of garnet Gd, the 1st spacer 2 (1,000Angstrom ) of SiO2 is provided and on it, Al-Cu conductor pattern 5 and the 2nd spacer 3 of SiO are formed to the same thickness (3,000-4,000Angstrom ). On the flat surface, the 3rd spacer 4 (1,000-3,000Angstrom ) of SiO2 is provided and on it, permalloy pattern 6 having a cycle of 16mum is provided. On the 3rd spacer 4 in the area surrounding it, permalloy pattern 6' having a cycle of 8mum is provided. Since the distance between pattern 6' and thin bubble film 1 can be made less than the thickness of conductor pattern 5 and conductor pattern 5 can be made thick, the current density of the conductor is lowered and driving force of the transfer pattern is improved to improve the reliability of the bubble element. |