Object illuminating arrangement for e.g. microscope, has light beam bundling lenses projecting far field of light bundles leaving from diffractive diffusers in two levels of microscope, where levels correspond to field level or pupil level

摘要

The arrangement has an excimer laser, and a computer generated hologram to homogenize partial coherent laser beams. Beam bundling lenses project a far field of light bundles leaving from diffractive diffusers in two levels (6, 7) of a microscope, where the level (6) corresponds to a field level and the level (7) corresponds to a pupil level or the level (6) corresponds to the pupil level and the level (7) corresponds to the field level.