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发明名称
DEVICE FOR ORIENTATION OF ROUND SUBSTRATES
摘要
申请公布号
SU881897(A1)
申请公布日期
1981.11.15
申请号
SU19752305153
申请日期
1975.12.30
申请人
ERKHARD YAKSH,DD
发明人
ERKHARD YAKSH,DD
分类号
B65G47/24;B65G47/252;G05D3/00;H01L21/68;(IPC1-7):H01L21/70
主分类号
B65G47/24
代理机构
代理人
主权项
地址
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