| 摘要 |
PURPOSE:To control an amount of an electrodeposition of glass and decrease glass cracks by a method wherein when glass corpuscles are electrodeposited on the semiconductor element surface by an electrophotoresist method, the electrodeposition is stopped when an electric potential of an electrodeposition liquid set up is detected. CONSTITUTION:A semiconductor element substrate 3 is dipped as an anode in the electrodeposition liquid and a platinum electrode 2 as a cathode, and are applied with a constant DC voltage to cause the glass corpuscles to electrodeposit the semiconductor element substrate 3 not covered with a silicon oxide film 4. The fact that the potential of the electrodeposition liquid and the amount of the electrodeposition of glass are corresponded to 1 to 1 has been found experimentally, so that a monitoring electrode 6 which monitors the amount of the electrodeposition is kept inserted in the electrodeposition liquid and the electrodeposition is stopped when the potential on an electrometer V reaches the value set in advance. Thereby, the amount of the glass can be controlled regardless of the amount of the glass in the electrodeposition liquid, and the glass cracks after the firing of the glass decrease. |
