| 摘要 |
PURPOSE:To accurately align the position of an optical fiber and obtain a stable waveguide with optical fiber of low losses by providing a metallic film on the glass layer formed on a substrate and forming desired patterns by etching. CONSTITUTION:A glass layer 12 for forming a waveguide is formed on a substrate, thence a metallic film of which the rate of etching is slower than that of glass is deposited thereon. This metallic film is etched to notch a mask pattern 10 for the purpose of a positioning groove 14 for an optical fiber and with this as a mask, a glass layer 12 is etched. Thence, a desired pattern which will be a waveguide core is etched and the glass layer 12 is etched to etch the core 17 and groove 14 for the waveguide. An optical fiber 15 is placed in this groove 14, and the end face of the fiber 15 and the end face of the core 17 are allowed to contact closely, whereby a clad leyer 16 of the waveguide is formed. |
