摘要 |
PURPOSE:To reduce dispassion by reducing the impurity concentration of a storage region of the output terminal of a horizontal register than that of other storage region, and preparing the impurity concentration of the output gate region of an output gate the same as that of the other storage region of the register. CONSTITUTION:The impurity concentration of the storage region 8S1' of the output terminal of a horizontal register 26 is reduced than that of other storage regions 8S1, 8S2, and the impurity concentration of the output gate region 13 of an output gate 27 is prepared the same as those of the other storage regions 8S1, 8S2 of the register 26. Accordingly, the potential level of the region 13 when an output gate electrode 14 is grounded is set to an intermediate value between the maximum potential level and the minimum potential level of the region 8S1', and signal charge transferred through a charge transfer passage 25 is smoothly transferred through an output gate region 13 to a charge detector 6. Thus, the reverse flow margin of the charge and the dynamic range of the detector can be increased. |