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发明名称
DEVICE AND METHOD FOR SCANNING BEAM FOR ION IMPLANTATION
摘要
申请公布号
JPS56145646(A)
申请公布日期
1981.11.12
申请号
JP19810023201
申请日期
1981.02.20
申请人
VARIAN ASSOCIATES
发明人
NOOMAN REONARUDO TAANAA
分类号
G01R31/265;H01J37/147;H01J37/317;H01L21/265
主分类号
G01R31/265
代理机构
代理人
主权项
地址
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