| 摘要 |
PURPOSE:To simply and fully purify parts without taking them out in the vacuum by purifying them in a vacuum mirror cavity by way of ion bombardment. CONSTITUTION:When a diaphragm 2 is purified, a switch 5 is switched to power supply E and ionized gas is induced around the upper part of the diaphragm 2 using a valve 8. In this case, the exhaust system of a mirror cavity 6 is kept actuated. Since the gas pressure around the diaphragm 2 increases considerably and the diaphragm 2 is set to the negative high potential, the outer surface of the diaphragm 2 is covered by glow discharge and the diaphragm 2 is ion-bombarded. The adhesive material on the diaphragm 2 is scattered by this ion bombardment and the surface of the diaphragm 2 is purified. |
