| 摘要 |
A method of monitoring activity in an automated fabrication facility in which work-in-process material lots undergo manufacturing operations and storage operations includes tracking processing load and unload times of the lots at each of the manufacturing operations; tracking processing start and stop times of each of the manufacturing operations performed on the lots; tracking movement of automatically guided vehicles and cassettes containing the lots for purposes of transferring the lots between the manufacturing and storage operations; tracking storage load and unload times of the lots stored in the intermediate storage operations; tracking requests for the automated transfer of lots and a time each automated transfer request is made; and combining the processing load and unload times, the processing start and stop times, the storage load and unload times, the times associated with the requests for automated transfer, and information regarding the movement of the guided vehicles to generate a report.
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