发明名称 METHOD OF TREATING A MONOCRYSTALLINE BODY
摘要 <p>A method in which a monocrystalline body is subjected in a gas atmosphere to a treatment changing the thickness of the body, in which the thickness of the body is controlled by means of a measuring member which is subjected to the same treatment and which measuring member, on its side which is subjected to the treatment, consists of a monocrystalline layer and an adjoining substratum of a material having a refractive index differing of that the monocrystalline layer material, characterized in that a measuring member is used in the manufacture of which the substratum is provided on a free surface of the monocrystalline layer.</p>
申请公布号 CA1112375(A) 申请公布日期 1981.11.10
申请号 CA19780311348 申请日期 1978.09.14
申请人 N.V. PHILIPS'GLOEILAMPENFABRIEKEN 发明人 KROON, SIMON G.
分类号 C30B25/02;C30B25/16;C30B33/00;C30B33/08;G01B11/06;H01L21/02;H01L21/205;H01L21/306;(IPC1-7):01L21/00 主分类号 C30B25/02
代理机构 代理人
主权项
地址