发明名称 |
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus |
摘要 |
A microwave plasma processing apparatus includes a processing vessel, a microwave generator, a waveguide guiding a microwave formed by the microwave generator, and a microwave emitting member emitting the microwave with wavelength compression by a retardation plate, wherein the waveguide has a single microwave output opening in a location corresponding to a central par of the microwave emitting member.
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申请公布号 |
US7325511(B2) |
申请公布日期 |
2008.02.05 |
申请号 |
US20030450149 |
申请日期 |
2003.06.11 |
申请人 |
GOTO NAOHISA;OHMI TADAHIRO;HIRAYAMA MASAKI;GOTO TETSUYA |
发明人 |
GOTO NAOHISA;OHMI TADAHIRO;HIRAYAMA MASAKI;GOTO TETSUYA |
分类号 |
C23C16/00;H05H1/46;B01J19/08;C23C16/511;C23F1/00;H01J37/32;H01L21/205;H01L21/302;H01L21/306;H01L21/3065 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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