| 摘要 |
PURPOSE:To considerably reduce EC element making time, make controlling easy and mass-produce titled elements by using Ir oxide as electrochromic (EC) material, and forming an EC layer by an ion plating method in an atmosphere contg. steam. CONSTITUTION:After a lower electrode 2 is formed on a transparent substrate 1, steam is introduced up to about 1X10<-3> Torr with Ir metal as a base material, an Ir oxide layer 3 is formed by an ion plating method, whereby the EC layer is provided. This process provides the structure close to the columnar structure contg. a large amount of H2O to the EC layer 3 and provides good response speed. Compared to a conventional method of forming Ir oxide by an electrolysis method, the EC layer 3 is formed in a shorter time more easily. After the formation of the layer 3, a counter electrode 5 is joined by way of a spacer 6, and electrolyte 4 is sealed, whereby the EC element is completed. |
