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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS56142667(A)
申请公布日期
1981.11.07
申请号
JP19810031448
申请日期
1981.03.06
申请人
IBM
发明人
CHIEN TSUON HOONGU
分类号
H01L21/76;H01L21/033;H01L21/331;H01L21/60;H01L21/762;H01L29/73;H01L29/732
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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