摘要 |
PURPOSE:To simplfiy the step of manufacturing a photoelectric converter by forming a photoelectric converting layer on a transparent conductive film of desired shape on a light transmitting substrate and further forming an opposed electrode by etching. CONSTITUTION:An electrode pattern 2 of desired shape is formed on a light transmitting substance substrate 1. The pattern 2 is formed of a transparent conductive film. Then, a photoelectric converting layer 3 is formed with mask on the pattern 2. The layer 3 is formed by sequentially laminating a II-VI group compound film 4 having relatively large band gap and a II-VI group compound film 5 having smaller band gap than that of the film 4. Then, an amorphous chalcogenide film 6 is formed on the film 3, electrode material is evaporated thereon, and the opposed electrode 9 are formed by etching. |