| 摘要 |
An apparatus for preventing overload of driving shaft in open infab indexer is provided to increase the life span of the indexer by preventing mapping errors, and reducing peeling of a screw lead of z-axis driving unit, and decreasing abrasion of a ball bearing. An indexer plate(20) settles a wafer cassette. An indexer plate supporter(30) is installed at the one side of the bottom surface of the indexer plate. A z-axis guide(40) is connected with an end of the supporter. A lead screw of a z-axis driving unit(50) is adjacent to a ball bearing within the z-axis guide, and is rotated by a driving motor. An indexer plate fixing block(80) is mounted at the other side at the bottom surface of the indexer plate. A fixing axis guide(85) is connected to the end of the indexer plate fixing block, and is slid along a fixing axis(90).
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