发明名称 PRODUCING SILICON FROM PLASMA
摘要 A method of producing silicon comprising producing a plasma in a gas flow laden with at least one silicon compound so that the silicon compound is reduced or decomposed to silicon and transporting the silicon which may have reacted with other material if present in the plasma and reaction products out of the plasma in the gas flow.
申请公布号 AU7005681(A) 申请公布日期 1981.11.05
申请号 AU19810070056 申请日期 1981.05.01
申请人 LICENTIA PATENT-VERWALTUNGS-GMBH 发明人 R. DAHLBERG
分类号 B01J12/00;C01B31/36;C01B33/02;C01B33/027;C01B33/06;C23C16/513;C30B25/02;C30B25/18;H01L31/18;H05H1/34;H05H1/42 主分类号 B01J12/00
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