发明名称 |
PRODUCING SILICON FROM PLASMA |
摘要 |
A method of producing silicon comprising producing a plasma in a gas flow laden with at least one silicon compound so that the silicon compound is reduced or decomposed to silicon and transporting the silicon which may have reacted with other material if present in the plasma and reaction products out of the plasma in the gas flow. |
申请公布号 |
AU7005681(A) |
申请公布日期 |
1981.11.05 |
申请号 |
AU19810070056 |
申请日期 |
1981.05.01 |
申请人 |
LICENTIA PATENT-VERWALTUNGS-GMBH |
发明人 |
R. DAHLBERG |
分类号 |
B01J12/00;C01B31/36;C01B33/02;C01B33/027;C01B33/06;C23C16/513;C30B25/02;C30B25/18;H01L31/18;H05H1/34;H05H1/42 |
主分类号 |
B01J12/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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