发明名称 INSPECTING DEVICE FOR SEMICONDUCTOR SUBSTRATE
摘要 PURPOSE:To readily establish an inspection table at a specified position by arranging two sheets of movable flat plates so that V-shaped concave parts provided on both plates face to each other. CONSTITUTION:The flat plate 1 and 1' are arranged at different levels so that the V-shaped concave parts 1a and 1'a face to each other and a cylindrical member 2 is located between the concave parts 1a and 1'a. When the flat plates 1 and 1' are moved in the direction of arrows A and B by a power means, the cylindrical member 2 can be positioned at a specified position without fail. The member 2 is fixed to a lower part 3' of a part 3a which is fitted for XY table and the like for the inspection table. In this constitution, the inspection table can be readily established at a specified position by the one-dimension movement of two falt plates having the V-shaped concave parts.
申请公布号 JPS56140639(A) 申请公布日期 1981.11.04
申请号 JP19800044325 申请日期 1980.04.04
申请人 KYUSHU NIPPON ELECTRIC 发明人 TAGUCHI YUKIHISA
分类号 H01L21/66;H01L21/68 主分类号 H01L21/66
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