发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To equalize the usage rate of wiring channels in a space between each of units by defining the distances between active units so that the number of the wiring channels at the central part of a chip is increased and the number thereof at the peripheral part is decreased. CONSTITUTION:On an LSI chip, are arranged the active units S1, S2... so that the distances between the channels both in the longitudinal and lateral directions are wide at its central part and narrow at its peripheral part. The channels in the lateral direction are used for the first-layer wirings and the channels in the longitudinal direction are used for the second-layer wirings. The wirings are connected through holes with an insulating film being held in-between. Five wirings channels are provided at the central part and three wiring channels are provided at the peripheral part in a space with the equal distances being provided. While the frequency of using the wiring channels are prone to be large at the central part and small at the peripheral part. Therefore, in this constitution, the degree of congestion of the channels are equalized, wiring design becomes easy, and the chip can be miniaturized in the wiring design under the same conditions.
申请公布号 JPS56140647(A) 申请公布日期 1981.11.04
申请号 JP19800043573 申请日期 1980.04.04
申请人 HITACHI LTD 发明人 IKEMOTO YASUHIRO;KANOU HIROSHI;HOSOSAKA SATORU
分类号 H01L21/822;H01L21/82;H01L27/02;H01L27/04;H01L27/118 主分类号 H01L21/822
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