| 摘要 |
An apparatus for diluting gas using a mass flow controller is provided to produce high precision diluted gas by discarding surplus gas through a water trap. An apparatus for diluting gas using an MFC(Mass Flow Controller) comprises a plurality of solenoid valves(11,12,13,14) installed on a plurality of inflow passages, respectively, first to fourth MFCs(31,32,33,34), a first water trap(41), an output terminal(60) and a control unit(70) controlling the solenoid valves and the first to fourth MFCs. The first MFC controls inflow of specific gas selected through the solenoid valve. The third and fourth MFCs control inflow of zero gas. The second MFC controls inflow of a first diluted gas which is diluted by mixing the specific gas and zero gas that are introduced through the first and third MFCs, respectively. The first water trap is installed on an input terminal of the second MFC. The output terminal allows a second diluted gas, which is diluted by mixing the first diluted gas and the zero gas.
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