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经营范围
发明名称
PATTERN GENERATOR
摘要
申请公布号
JPS56140439(A)
申请公布日期
1981.11.02
申请号
JP19800044000
申请日期
1980.04.03
申请人
MINATOEREKUTORONIKUSU KK
发明人
ONODA NOBORU
分类号
H01L21/66;G01R31/3183;G06F3/14;G06F3/153;G11C29/10;H01L21/822;H01L27/04
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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