| 摘要 |
PURPOSE:To obtain a pressure converter capable of temperature compensation by providing a diffusion resistance forming a bridge circuit end a P-N junction part which corrects temperatures on a pressure-receiving diaphragm for a semiconductor. CONSTITUTION:P type semiconductor diffusion resistances 2, 3 and P-N sealing part 22 where P type semiconductor is diffused are formed on N type semiconductor pressure-receiving diaphragm 1. Then a bridge circuit is formed with diffusion resistances 2, 3, fixed resistances 6, 7 and variable resistances 5, 8. An input is entered into an addition circuit 33 through a differential amplifier 9. In addition, voltage at the both ends of the P-N junction part 22 connected directly to a power supply 24 is connected to one input terminal. In the meanwhile the other input terminal inputs an output from a differential amplifier 25 connected by the common part of the resistances 26, 27 to the addition circuit 33 through the intermediary of a variable gain amplifier 28. A variable resistance 5 is adjusted so that it may be represented by the formula (1) and a variable resistance 8 is adjusted in such a manner that a differential amplifier 9 produces zero output at T=To. Following this procedure, variable resistances 28, 29 are adjusted so that the formula (alpha.G/R35)+(gamma/R36)= 0 (alpha: constant, G: amplification degree of amplifier 9, gamma: gain of amplifier 28) may be established. As a result, the secondary temperature compensation is made possible. |
