| 摘要 |
PURPOSE:To prevent the occurrence of metallic copper deposits in the solution by attaching an ultrasonic vibrator to the tip of the feed pipe for replenisher of an electroless copper plating apparatus to uniformly disperse a replenisher in a plating solu. in the plating vessel. CONSTITUTION:An electroless copper plating vessel is connected through circulating pipe 2, and a fresh electroless plating solu. in supplied from the replenisher tank 7 through pipe 12. At this time, ultrasonic vibrator 10 is attached to the tip of pipe 12 to apply ultrasonic vibration to the replenisher fed into pipe 2 from horn tip 11. By this vibration the replenisher is uniformly dispersed in and mixed with a plating bath in the vessel, so the occurrence of metallic copper deposits due to abnormal concn. of the bath is prevented. |
