发明名称 TECHNIQUES FOR REDUCING AN ELECTRICAL STRESS IN AN ACCELERATION/DECELERATION SYSTEM
摘要 <p>Techniques for reducing an electrical stress in a acceleration/deceleration system are disclosed. In one particular exemplary embodiment, the techniques may be realized as an acceleration/deceleration system. The acceleration/deceleration system may comprise an acceleration column including a plurality of electrodes having apertures through which a charged particle beam may pass. The acceleration/deceleration system may also comprise a plurality of voltage grading components respectively electrically coupled to the plurality of electrodes. The acceleration/deceleration system may further comprise a plurality of insulated conductors disposed proximate the plurality of voltage grading components to modify an electrical field about the plurality of voltage grading components.</p>
申请公布号 WO2009076407(A1) 申请公布日期 2009.06.18
申请号 WO2008US86170 申请日期 2008.12.10
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;TEKLETSADIX, KASEGN;LOW, RUSSELL, J. 发明人 TEKLETSADIX, KASEGN;LOW, RUSSELL, J.
分类号 H01L21/3065;H01L21/265 主分类号 H01L21/3065
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