TECHNIQUES FOR REDUCING AN ELECTRICAL STRESS IN AN ACCELERATION/DECELERATION SYSTEM
摘要
<p>Techniques for reducing an electrical stress in a acceleration/deceleration system are disclosed. In one particular exemplary embodiment, the techniques may be realized as an acceleration/deceleration system. The acceleration/deceleration system may comprise an acceleration column including a plurality of electrodes having apertures through which a charged particle beam may pass. The acceleration/deceleration system may also comprise a plurality of voltage grading components respectively electrically coupled to the plurality of electrodes. The acceleration/deceleration system may further comprise a plurality of insulated conductors disposed proximate the plurality of voltage grading components to modify an electrical field about the plurality of voltage grading components.</p>
申请公布号
WO2009076407(A1)
申请公布日期
2009.06.18
申请号
WO2008US86170
申请日期
2008.12.10
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;TEKLETSADIX, KASEGN;LOW, RUSSELL, J.