Measuring waviness of surface - using distortion of pattern transmitted via surface and compared with undistorted pattern

摘要

The method of determining the waxiness of an essentially plane surface of an object enables highly accurate results to be obtained. The deviation of the actual surface from the desired surface can be measured at almost any required number of points with minimal measurement time. An image pattern (2) of known geometry associated with the desired surface (1.1) is compared with the image pattern after transfer via the surface (1) of the object. The image pattern is a self-illuminating point pattern. The image reflected from the object is received by an optical device (3) of known characteristics at a defined distance from the surface. The image may be scanned by optoelectrical detectors whose signals are compared with stored signals corresp. to the desired surface.